In semiconductor and data storage device manufacturing, it is desirable to produce feature sizes less than 30 nm with a high depth-to-width aspect ratio on the target material rapidly at a low cost.

Toward the end of the 19th century, Abbe and Rayleigh formulated the principles of optical diffraction that limits the resolution of optical instruments in the far-field where the distance between the ...

To address the problem of short-range laser circumferential detection, this paper proposes a static detection method based on a transmissive-reflective combined optical system, Building upon previous ...